High Speed Localized Cooling using SiGe Superlattice Microrefrigerators
نویسندگان
چکیده
In this paper, thin film based SiGe superlattice microrefrigerators are fabricated and characterized in terms of maximum cooling, power density and transient response. The localized cooling and fast transient response less than 40ps, demonstrate the potential for hot spot cooling of optoelectronics, microprocessor and IC chips.
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تاریخ انتشار 2004